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• W2030223669 abstract "Low pressure inductively coupled plasmas (ICP) operated in neon at 27.12 MHz with capacitive substrate biasing (CCP) at 13.56 MHz are investigated by phase resolved optical emission spectroscopy, voltage, and current measurements. Three coupling mechanisms are found potentially limiting the separate control of ion energy and flux: (i) Sheath heating due to the substrate biasing affects the electron dynamics even at high ratios of ICP to CCP power. At fixed CCP power, (ii) the substrate sheath voltage and (iii) the amplitude as well as frequency of plasma series resonance oscillations of the RF current are affected by the ICP power." @default.
• W2030223669 created "2016-06-24" @default.
• W2030223669 creator A5005908187 @default.
• W2030223669 creator A5010518216 @default.
• W2030223669 creator A5053790526 @default.
• W2030223669 date "2012-01-09" @default.
• W2030223669 modified "2023-10-16" @default.
• W2030223669 title "Coupling effects in inductive discharges with radio frequency substrate biasing" @default.
• W2030223669 cites W1972372311 @default.
• W2030223669 cites W1973718308 @default.
• W2030223669 cites W1980234811 @default.
• W2030223669 cites W2000786278 @default.
• W2030223669 cites W2006634883 @default.
• W2030223669 cites W2007201787 @default.
• W2030223669 cites W2007305165 @default.
• W2030223669 cites W2014182649 @default.
• W2030223669 cites W2021711191 @default.
• W2030223669 cites W2038162632 @default.
• W2030223669 cites W2053365844 @default.
• W2030223669 cites W2059380773 @default.
• W2030223669 cites W2060296087 @default.
• W2030223669 cites W2068247096 @default.
• W2030223669 cites W2085669348 @default.
• W2030223669 cites W2095440262 @default.
• W2030223669 cites W2102337165 @default.
• W2030223669 cites W2112552636 @default.
• W2030223669 cites W2116666365 @default.
• W2030223669 cites W2150759874 @default.
• W2030223669 cites W2151313786 @default.
• W2030223669 cites W2162999431 @default.
• W2030223669 cites W2164335666 @default.
• W2030223669 cites W2169060080 @default.
• W2030223669 cites W4239274462 @default.
• W2030223669 doi "https://doi.org/10.1063/1.3675879" @default.
• W2030223669 hasPublicationYear "2012" @default.
• W2030223669 type Work @default.
• W2030223669 sameAs 2030223669 @default.
• W2030223669 citedByCount "50" @default.
• W2030223669 countsByYear W20302236692012 @default.
• W2030223669 countsByYear W20302236692013 @default.
• W2030223669 countsByYear W20302236692014 @default.
• W2030223669 countsByYear W20302236692015 @default.
• W2030223669 countsByYear W20302236692016 @default.
• W2030223669 countsByYear W20302236692017 @default.
• W2030223669 countsByYear W20302236692018 @default.
• W2030223669 countsByYear W20302236692019 @default.
• W2030223669 countsByYear W20302236692020 @default.
• W2030223669 countsByYear W20302236692021 @default.
• W2030223669 countsByYear W20302236692022 @default.
• W2030223669 countsByYear W20302236692023 @default.
• W2030223669 crossrefType "journal-article" @default.
• W2030223669 hasAuthorship W2030223669A5005908187 @default.
• W2030223669 hasAuthorship W2030223669A5010518216 @default.
• W2030223669 hasAuthorship W2030223669A5053790526 @default.
• W2030223669 hasConcept C111368507 @default.
• W2030223669 hasConcept C113196181 @default.
• W2030223669 hasConcept C121332964 @default.
• W2030223669 hasConcept C127313418 @default.
• W2030223669 hasConcept C131584629 @default.
• W2030223669 hasConcept C145148216 @default.
• W2030223669 hasConcept C165801399 @default.
• W2030223669 hasConcept C177872590 @default.
• W2030223669 hasConcept C178790620 @default.
• W2030223669 hasConcept C184779094 @default.
• W2030223669 hasConcept C185592680 @default.
• W2030223669 hasConcept C191897082 @default.
• W2030223669 hasConcept C192562407 @default.
• W2030223669 hasConcept C20254490 @default.
• W2030223669 hasConcept C2777289219 @default.
• W2030223669 hasConcept C43503373 @default.
• W2030223669 hasConcept C43617362 @default.
• W2030223669 hasConcept C49040817 @default.
• W2030223669 hasConcept C522602180 @default.
• W2030223669 hasConcept C547737533 @default.
• W2030223669 hasConcept C62520636 @default.
• W2030223669 hasConcept C68278764 @default.
• W2030223669 hasConcept C82706917 @default.
• W2030223669 hasConcept C95974651 @default.
• W2030223669 hasConceptScore W2030223669C111368507 @default.
• W2030223669 hasConceptScore W2030223669C113196181 @default.
• W2030223669 hasConceptScore W2030223669C121332964 @default.
• W2030223669 hasConceptScore W2030223669C127313418 @default.
• W2030223669 hasConceptScore W2030223669C131584629 @default.
• W2030223669 hasConceptScore W2030223669C145148216 @default.
• W2030223669 hasConceptScore W2030223669C165801399 @default.
• W2030223669 hasConceptScore W2030223669C177872590 @default.
• W2030223669 hasConceptScore W2030223669C178790620 @default.
• W2030223669 hasConceptScore W2030223669C184779094 @default.
• W2030223669 hasConceptScore W2030223669C185592680 @default.
• W2030223669 hasConceptScore W2030223669C191897082 @default.
• W2030223669 hasConceptScore W2030223669C192562407 @default.
• W2030223669 hasConceptScore W2030223669C20254490 @default.
• W2030223669 hasConceptScore W2030223669C2777289219 @default.
• W2030223669 hasConceptScore W2030223669C43503373 @default.
• W2030223669 hasConceptScore W2030223669C43617362 @default.
• W2030223669 hasConceptScore W2030223669C49040817 @default.
• W2030223669 hasConceptScore W2030223669C522602180 @default.
• W2030223669 hasConceptScore W2030223669C547737533 @default.
• W2030223669 hasConceptScore W2030223669C62520636 @default.
• W2030223669 hasConceptScore W2030223669C68278764 @default.

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