FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2030888902> ?p ?o ?g. }

• W2030888902 endingPage "H271" @default.
• W2030888902 startingPage "H271" @default.
• W2030888902 abstract "Electrochemical anodization of bulk silicon has applications in many micromachining processes. However, its use for silicon photonics is limited because silicon-on-insulator (SOI) wafers cannot be anodized using a conventional process because of the buried oxide. We overcome this using an alternating potential to induce an ac across an SOI wafer, treating it as a capacitative structure. The resultant surface roughness is comparable to that obtained using conventional anodization, and uniform etching across a 6 mm exposed surface is obtained with a minimum patterned linewidth of in the device layer." @default.
• W2030888902 created "2016-06-24" @default.
• W2030888902 creator A5025085059 @default.
• W2030888902 creator A5028080047 @default.
• W2030888902 creator A5039579609 @default.
• W2030888902 creator A5058557992 @default.
• W2030888902 creator A5062020397 @default.
• W2030888902 creator A5071432172 @default.
• W2030888902 creator A5077883331 @default.
• W2030888902 creator A5081677540 @default.
• W2030888902 date "2010-01-01" @default.
• W2030888902 modified "2023-09-27" @default.
• W2030888902 title "Electrochemical Anodization of Silicon-on-Insulator Wafers Using an AC" @default.
• W2030888902 cites W1983194164 @default.
• W2030888902 cites W1987885416 @default.
• W2030888902 cites W1990879818 @default.
• W2030888902 cites W1997575856 @default.
• W2030888902 cites W1999670237 @default.
• W2030888902 cites W2002483663 @default.
• W2030888902 cites W2003389333 @default.
• W2030888902 cites W2011861104 @default.
• W2030888902 cites W2021568590 @default.
• W2030888902 cites W2032701296 @default.
• W2030888902 cites W2034399670 @default.
• W2030888902 cites W2035515924 @default.
• W2030888902 cites W2036603121 @default.
• W2030888902 cites W2058326937 @default.
• W2030888902 cites W2079699561 @default.
• W2030888902 cites W2097448833 @default.
• W2030888902 cites W2125964296 @default.
• W2030888902 cites W2157420334 @default.
• W2030888902 cites W2496933069 @default.
• W2030888902 doi "https://doi.org/10.1149/1.3431038" @default.
• W2030888902 hasPublicationYear "2010" @default.
• W2030888902 type Work @default.
• W2030888902 sameAs 2030888902 @default.
• W2030888902 citedByCount "0" @default.
• W2030888902 crossrefType "journal-article" @default.
• W2030888902 hasAuthorship W2030888902A5025085059 @default.
• W2030888902 hasAuthorship W2030888902A5028080047 @default.
• W2030888902 hasAuthorship W2030888902A5039579609 @default.
• W2030888902 hasAuthorship W2030888902A5058557992 @default.
• W2030888902 hasAuthorship W2030888902A5062020397 @default.
• W2030888902 hasAuthorship W2030888902A5071432172 @default.
• W2030888902 hasAuthorship W2030888902A5077883331 @default.
• W2030888902 hasAuthorship W2030888902A5081677540 @default.
• W2030888902 hasConcept C100460472 @default.
• W2030888902 hasConcept C107365816 @default.
• W2030888902 hasConcept C120665830 @default.
• W2030888902 hasConcept C121332964 @default.
• W2030888902 hasConcept C142181693 @default.
• W2030888902 hasConcept C159985019 @default.
• W2030888902 hasConcept C160671074 @default.
• W2030888902 hasConcept C171250308 @default.
• W2030888902 hasConcept C192562407 @default.
• W2030888902 hasConcept C212702 @default.
• W2030888902 hasConcept C22016385 @default.
• W2030888902 hasConcept C2779227376 @default.
• W2030888902 hasConcept C49040817 @default.
• W2030888902 hasConcept C513153333 @default.
• W2030888902 hasConcept C520434653 @default.
• W2030888902 hasConcept C53143962 @default.
• W2030888902 hasConcept C544956773 @default.
• W2030888902 hasConcept C71039073 @default.
• W2030888902 hasConceptScore W2030888902C100460472 @default.
• W2030888902 hasConceptScore W2030888902C107365816 @default.
• W2030888902 hasConceptScore W2030888902C120665830 @default.
• W2030888902 hasConceptScore W2030888902C121332964 @default.
• W2030888902 hasConceptScore W2030888902C142181693 @default.
• W2030888902 hasConceptScore W2030888902C159985019 @default.
• W2030888902 hasConceptScore W2030888902C160671074 @default.
• W2030888902 hasConceptScore W2030888902C171250308 @default.
• W2030888902 hasConceptScore W2030888902C192562407 @default.
• W2030888902 hasConceptScore W2030888902C212702 @default.
• W2030888902 hasConceptScore W2030888902C22016385 @default.
• W2030888902 hasConceptScore W2030888902C2779227376 @default.
• W2030888902 hasConceptScore W2030888902C49040817 @default.
• W2030888902 hasConceptScore W2030888902C513153333 @default.
• W2030888902 hasConceptScore W2030888902C520434653 @default.
• W2030888902 hasConceptScore W2030888902C53143962 @default.
• W2030888902 hasConceptScore W2030888902C544956773 @default.
• W2030888902 hasConceptScore W2030888902C71039073 @default.
• W2030888902 hasIssue "8" @default.
• W2030888902 hasLocation W20308889021 @default.
• W2030888902 hasOpenAccess W2030888902 @default.
• W2030888902 hasPrimaryLocation W20308889021 @default.
• W2030888902 hasRelatedWork W1018789878 @default.
• W2030888902 hasRelatedWork W1536397480 @default.
• W2030888902 hasRelatedWork W1964253164 @default.
• W2030888902 hasRelatedWork W1970133672 @default.
• W2030888902 hasRelatedWork W1987851092 @default.
• W2030888902 hasRelatedWork W2006155585 @default.
• W2030888902 hasRelatedWork W2010481829 @default.
• W2030888902 hasRelatedWork W2240919621 @default.
• W2030888902 hasRelatedWork W2365055564 @default.
• W2030888902 hasRelatedWork W2387343942 @default.
• W2030888902 hasVolume "13" @default.
• W2030888902 isParatext "false" @default.

• next