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- W2044791036 abstract "Hexagonal boron nitride (hBN) is a promising deep ultraviolet light emitter. Here we report the catalytic growth of hBN films by microwave plasma chemical vapor deposition (MPCVD). The hBN films were first grown on Mo/Si substrate from a gas mixture of N2, BF3, and H2 and then annealed in nitrogen for 3 h at 900 °C. The Mo catalysts exhibit obvious catalyzing effects in improving the crystallinity of the hBN films during the growth and annealing processes. Well-crystallized hBN films with small Raman peak width of 9.3 cm−1 and sharp photoluminescence emission peak at 293 nm were obtained." @default.
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- W2044791036 date "2012-10-01" @default.
- W2044791036 modified "2023-09-26" @default.
- W2044791036 title "Crystallinity improvement of hexagonal boron nitride films by molybdenum catalysts during microwave plasma chemical vapor deposition and post-annealing" @default.
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- W2044791036 doi "https://doi.org/10.1016/j.apsusc.2012.06.108" @default.
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