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• W2046792015 abstract "We have investigated the structures of silicon-containing diamond-like carbon (DLC-Si) films with various silicon contents. The DLC-Si films were deposited on steel substrates at 773 K by direct current plasma-enhanced chemical vapour deposition (DC-PECVD). The Si content in the films was controlled in the range of 4–28 at.% by adjusting the ratio of methane (CH4) and tetramethylsilane (Si(CH3)4) as the precursor gases. Several typical spectroscopic measurements provided the film information: elastic recoil detection analysis (ERDA), hydrogen content; electron probe microanalysis (EPMA), carbon and silicon content; Fourier transform infrared (FT-IR), chemical bonding; and Raman scattering, networking due to the sp2 carbon (Csp2). In addition, solid-state 13C nuclear magnetic resonance (NMR) measurements were able to quantify the two types of hybridized carbon atoms, Csp2 and Csp3. The cross-polarization technique provided more precise environments for the carbon atoms bonded to hydrogen atoms, suggesting that the environment of Csp2 is quite different depending on the silicon content. The 29Si NMR measurement was also carried out to provide the circumstance of the four-coordinate Si atoms. In addition, the mechanical property of the films (hardness) was evaluated by the nanoindentation method in order to compare it with the film structure." @default.
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• W2046792015 date "2006-04-01" @default.
• W2046792015 modified "2023-10-01" @default.
• W2046792015 title "Structural analysis of Si-containing diamond-like carbon" @default.
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• W2046792015 doi "https://doi.org/10.1016/j.diamond.2005.12.020" @default.
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