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• W2054891512 abstract "A ± 0.3 ° precision in angular-position measurement over a 360 ° rotation has been obtained with a novel fully integrated 3-D magnetic sensor. This low-field sensor, based on buried silicon Hall devices, combines two vertical Hall devices for the planar sensitivity and novel horizontal Hall elements for the orthogonal sensitivity. The advantages of this sensor are its very low cross-sensitivity and its remarkably high long-term stability. The X and Y directions are used as high-precision angular-position measurements and the third direction helps to compensate for mechanical misalignment." @default.
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• W2054891512 date "1998-05-01" @default.
• W2054891512 modified "2023-10-01" @default.
• W2054891512 title "New fully integrated 3-D silicon Hall sensor for precise angular-position measurements" @default.
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• W2054891512 doi "https://doi.org/10.1016/s0924-4247(97)01750-0" @default.
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