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• W2088565536 abstract "Abstract Large-area silica films have been deposited on silicon wafers using silane, nitrous oxide and argon gas mixtures and an ArF excimer laser in parallel configuration. An exhaustive study has been carried out on the role of the total and partial pressure of the various components of the gas mixture on the growth and the properties of silica films. Films are characterized by FT-IR spectroscopy and ellipsometry." @default.
• W2088565536 created "2016-06-24" @default.
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• W2088565536 date "1990-12-01" @default.
• W2088565536 modified "2023-10-15" @default.
• W2088565536 title "Gas mixture dependence of the LCVD of SiO2 films using an ArF laser" @default.
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• W2088565536 doi "https://doi.org/10.1016/0169-4332(90)90143-n" @default.
• W2088565536 hasPublicationYear "1990" @default.
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