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• W2099755087 startingPage "659" @default.
• W2099755087 abstract "A process that allows control over the 3D motion of catalyst nanostructures during metal-assisted chemical etching by their local pinning prior to etching is demonstrated. The pinning material acts as a fulcrum for rotation of the catalyst structures resulting in etching of silicon features with rotational geometry." @default.
• W2099755087 created "2016-06-24" @default.
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• W2099755087 date "2010-12-06" @default.
• W2099755087 modified "2023-10-16" @default.
• W2099755087 title "Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon" @default.
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• W2099755087 doi "https://doi.org/10.1002/adma.201003833" @default.
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