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• W2108751330 abstract "This paper describes a simple noncontact scanned probe microscope for the static potential measurement of operating integrated circuits. The instrument extracts the local potential on the integrated circuit by nulling the electrostatic force between a small cantilever probe and the circuit test point. The force is detected by monitoring the mechanical deflection of the probe with an optical fiber interferometer. The constructed instrument has demonstrated a millivolt accuracy with a spatial resolution of less than 3 /spl mu/m. Measurements can be made directly in air on circuits both with and without a top insulating passivation layer. The nulling technique allows absolute potential measurements to be performed without complex calibration requirements.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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• W2108751330 date "1994-06-01" @default.
• W2108751330 modified "2023-09-27" @default.
• W2108751330 title "Noninvasive scanned probe potentiometry for integrated circuit diagnostics" @default.
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• W2108751330 doi "https://doi.org/10.1109/19.293469" @default.
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