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• W2116795653 abstract "The suitability of Nano channel Alumina (NCA) as template for pattern transfer is studied as part of a nanoimprint process. Our investigation revealed that a commercially available NCA (Anodisc/sup TM/ 13) is brittle in nature with high surface roughness but the roughness may be reduced by sputter coating the NCA with SiO/sub 2/. We also report on characterization of the surface morphology of spin coated PMMA (Polymethylmethacrylate) film, which plays a vital role in the imprint process." @default.
• W2116795653 created "2016-06-24" @default.
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• W2116795653 date "2002-11-13" @default.
• W2116795653 modified "2023-09-26" @default.
• W2116795653 title "Characterization of Nano Channel Alumina for pattern transfer on silicon as part of a nanoimprint process" @default.
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• W2116795653 doi "https://doi.org/10.1109/nano.2001.966431" @default.
• W2116795653 hasPublicationYear "2002" @default.
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