FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2129210006> ?p ?o ?g. }

• W2129210006 endingPage "66" @default.
• W2129210006 startingPage "59" @default.
• W2129210006 abstract "Low-power, plasma-enhanced (PE)CVD together with polymerization of methyl methacrylate (MMA) can be used to deposit thin films of poly(methyl methacrylate) (PMMA) with minimal loss of functional groups, as shown by Fourier transform infrared (FTIR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and Raman spectrometry (RS). Retention of functional groups decreases with increased substrate temperature, corresponding to decreased deposition rates. From XPS data, the calculated percentage loss of functional groups ranges from 0.9 % to 43.4 %, changing as a function of deposition conditions. RS confirms the presence of C=C bonds in the polymer backbone as a result of scission of the ester group from MMA. The thermal properties of PECVD-produced films from MMA can be tailored by varying the substrate temperature. Onset of thermal decomposition, increases with increased substrate temperature by eliminating thermally labile peroxide linkages in the polymer backbone, and by crosslinking that occurs at radical sites generated via scission of functional group bonds. The post-anneal thicknesses of the remaining polymer is of the order of 4 nm or less, indicating that low-power PECVD of PMMA is a viable candidate to act as a sacrificial material for air-gap fabrication." @default.
• W2129210006 created "2016-06-24" @default.
• W2129210006 creator A5057456811 @default.
• W2129210006 creator A5061958103 @default.
• W2129210006 date "2006-01-01" @default.
• W2129210006 modified "2023-10-05" @default.
• W2129210006 title "Effect of Substrate Temperature on the Plasma Polymerization of Poly(methyl methacrylate)" @default.
• W2129210006 cites W1797163825 @default.
• W2129210006 cites W1895033495 @default.
• W2129210006 cites W1898575970 @default.
• W2129210006 cites W1963712193 @default.
• W2129210006 cites W1968926231 @default.
• W2129210006 cites W1974359402 @default.
• W2129210006 cites W1976991040 @default.
• W2129210006 cites W1982677397 @default.
• W2129210006 cites W1982862345 @default.
• W2129210006 cites W1984114340 @default.
• W2129210006 cites W1991174414 @default.
• W2129210006 cites W1996212045 @default.
• W2129210006 cites W1998847762 @default.
• W2129210006 cites W1999544989 @default.
• W2129210006 cites W2005573976 @default.
• W2129210006 cites W2009880542 @default.
• W2129210006 cites W2011817488 @default.
• W2129210006 cites W2018175406 @default.
• W2129210006 cites W2018349131 @default.
• W2129210006 cites W2020879772 @default.
• W2129210006 cites W2030784418 @default.
• W2129210006 cites W2034066345 @default.
• W2129210006 cites W2036809956 @default.
• W2129210006 cites W2040253345 @default.
• W2129210006 cites W2041305584 @default.
• W2129210006 cites W2046217945 @default.
• W2129210006 cites W2050974428 @default.
• W2129210006 cites W2055869191 @default.
• W2129210006 cites W2061367080 @default.
• W2129210006 cites W2071125967 @default.
• W2129210006 cites W2071171547 @default.
• W2129210006 cites W2078591256 @default.
• W2129210006 cites W2083467558 @default.
• W2129210006 cites W2085495168 @default.
• W2129210006 cites W2090464492 @default.
• W2129210006 cites W2098200381 @default.
• W2129210006 cites W2104459526 @default.
• W2129210006 cites W2132604099 @default.
• W2129210006 cites W4235153977 @default.
• W2129210006 doi "https://doi.org/10.1002/cvde.200506409" @default.
• W2129210006 hasPublicationYear "2006" @default.
• W2129210006 type Work @default.
• W2129210006 sameAs 2129210006 @default.
• W2129210006 citedByCount "44" @default.
• W2129210006 countsByYear W21292100062012 @default.
• W2129210006 countsByYear W21292100062013 @default.
• W2129210006 countsByYear W21292100062014 @default.
• W2129210006 countsByYear W21292100062015 @default.
• W2129210006 countsByYear W21292100062016 @default.
• W2129210006 countsByYear W21292100062018 @default.
• W2129210006 countsByYear W21292100062019 @default.
• W2129210006 countsByYear W21292100062020 @default.
• W2129210006 countsByYear W21292100062022 @default.
• W2129210006 crossrefType "journal-article" @default.
• W2129210006 hasAuthorship W2129210006A5057456811 @default.
• W2129210006 hasAuthorship W2129210006A5061958103 @default.
• W2129210006 hasConcept C111368507 @default.
• W2129210006 hasConcept C115545448 @default.
• W2129210006 hasConcept C121332964 @default.
• W2129210006 hasConcept C127313418 @default.
• W2129210006 hasConcept C127413603 @default.
• W2129210006 hasConcept C132050475 @default.
• W2129210006 hasConcept C159985019 @default.
• W2129210006 hasConcept C188027245 @default.
• W2129210006 hasConcept C192562407 @default.
• W2129210006 hasConcept C2777289219 @default.
• W2129210006 hasConcept C2777935641 @default.
• W2129210006 hasConcept C2780718992 @default.
• W2129210006 hasConcept C42360764 @default.
• W2129210006 hasConcept C44228677 @default.
• W2129210006 hasConcept C521977710 @default.
• W2129210006 hasConcept C62520636 @default.
• W2129210006 hasConcept C82706917 @default.
• W2129210006 hasConceptScore W2129210006C111368507 @default.
• W2129210006 hasConceptScore W2129210006C115545448 @default.
• W2129210006 hasConceptScore W2129210006C121332964 @default.
• W2129210006 hasConceptScore W2129210006C127313418 @default.
• W2129210006 hasConceptScore W2129210006C127413603 @default.
• W2129210006 hasConceptScore W2129210006C132050475 @default.
• W2129210006 hasConceptScore W2129210006C159985019 @default.
• W2129210006 hasConceptScore W2129210006C188027245 @default.
• W2129210006 hasConceptScore W2129210006C192562407 @default.
• W2129210006 hasConceptScore W2129210006C2777289219 @default.
• W2129210006 hasConceptScore W2129210006C2777935641 @default.
• W2129210006 hasConceptScore W2129210006C2780718992 @default.
• W2129210006 hasConceptScore W2129210006C42360764 @default.
• W2129210006 hasConceptScore W2129210006C44228677 @default.
• W2129210006 hasConceptScore W2129210006C521977710 @default.
• W2129210006 hasConceptScore W2129210006C62520636 @default.
• W2129210006 hasConceptScore W2129210006C82706917 @default.
• W2129210006 hasIssue "1" @default.

• next