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- W2243378511 abstract "This paper presents the development of electrostatically actuated polymer-based microelectromechanical relays as a potential replacement for organic field-effect thin-film transistors in order to enable near-zero-power flexible transparent large-area electronics. A low-temperature five-mask surface-micromachining process is developed to fabricate two types of prototype relays: purely polymeric and partially polymeric (inorganic–organic hybrid) relays. Experimental results demonstrate the operation of the prototypes as a switch, showing immeasurably low OFF-state leakage current ( $sim 10$ fA), abrupt switching behavior and high ON/OFF-current ratio (>105 over an effective input voltage swing of ≤100 mV), small hysteresis voltages (≤100 mV), and low contact adhesive forces ( $mu text{m}^{2})$ . The influence of temperature on switching characteristics, including hysteresis voltages, is investigated as well." @default.
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- W2243378511 date "2016-02-01" @default.
- W2243378511 modified "2023-09-27" @default.
- W2243378511 title "Organic Microelectromechanical Relays for Ultralow-Power Flexible Transparent Large-Area Electronics" @default.
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- W2243378511 doi "https://doi.org/10.1109/ted.2015.2507520" @default.
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