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• W2600180132 abstract "Following Moore’s law, integrated circuit requires scaling gate length to 14nm and beyond. To enable such gate-length scaling, finFETs have widely replaced planar metal-oxide-semiconductor field-effect transistors (MOSFETs) due to its special 3D structure could provide larger effective channel width and better short channel controllability. However, Fin critical dimension (CD) and profile variation between dense and ISO fin in a conventional etch process can introduce additional device degradation. Therefore, rigorous process loading control in reactive ion etch (RIE) becomes more critical. This paper mainly focused on self-aligned double patterning mandrel etch and fin etch by using advanced pulsed plasma to deliver a well-loading fin." @default.
• W2600180132 created "2017-04-07" @default.
• W2600180132 creator A5019679241 @default.
• W2600180132 creator A5046626172 @default.
• W2600180132 creator A5075353851 @default.
• W2600180132 date "2017-03-21" @default.
• W2600180132 modified "2023-09-23" @default.
• W2600180132 title "The application of advanced pulsed plasma in Fin etch loading improvement" @default.
• W2600180132 doi "https://doi.org/10.1117/12.2266539" @default.
• W2600180132 hasPublicationYear "2017" @default.
• W2600180132 type Work @default.
• W2600180132 sameAs 2600180132 @default.
• W2600180132 citedByCount "0" @default.
• W2600180132 crossrefType "proceedings-article" @default.
• W2600180132 hasAuthorship W2600180132A5019679241 @default.
• W2600180132 hasAuthorship W2600180132A5046626172 @default.
• W2600180132 hasAuthorship W2600180132A5075353851 @default.
• W2600180132 hasConcept C100460472 @default.
• W2600180132 hasConcept C107187091 @default.
• W2600180132 hasConcept C119599485 @default.
• W2600180132 hasConcept C120665830 @default.
• W2600180132 hasConcept C121332964 @default.
• W2600180132 hasConcept C121684516 @default.
• W2600180132 hasConcept C127413603 @default.
• W2600180132 hasConcept C134786449 @default.
• W2600180132 hasConcept C159985019 @default.
• W2600180132 hasConcept C165801399 @default.
• W2600180132 hasConcept C171250308 @default.
• W2600180132 hasConcept C172385210 @default.
• W2600180132 hasConcept C17525397 @default.
• W2600180132 hasConcept C177409738 @default.
• W2600180132 hasConcept C192562407 @default.
• W2600180132 hasConcept C207789793 @default.
• W2600180132 hasConcept C2524010 @default.
• W2600180132 hasConcept C2778413303 @default.
• W2600180132 hasConcept C2779227376 @default.
• W2600180132 hasConcept C28826006 @default.
• W2600180132 hasConcept C30066665 @default.
• W2600180132 hasConcept C33923547 @default.
• W2600180132 hasConcept C41008148 @default.
• W2600180132 hasConcept C48209547 @default.
• W2600180132 hasConcept C49040817 @default.
• W2600180132 hasConcept C53524968 @default.
• W2600180132 hasConcept C62520636 @default.
• W2600180132 hasConcept C82706917 @default.
• W2600180132 hasConcept C91721477 @default.
• W2600180132 hasConcept C99844830 @default.
• W2600180132 hasConceptScore W2600180132C100460472 @default.
• W2600180132 hasConceptScore W2600180132C107187091 @default.
• W2600180132 hasConceptScore W2600180132C119599485 @default.
• W2600180132 hasConceptScore W2600180132C120665830 @default.
• W2600180132 hasConceptScore W2600180132C121332964 @default.
• W2600180132 hasConceptScore W2600180132C121684516 @default.
• W2600180132 hasConceptScore W2600180132C127413603 @default.
• W2600180132 hasConceptScore W2600180132C134786449 @default.
• W2600180132 hasConceptScore W2600180132C159985019 @default.
• W2600180132 hasConceptScore W2600180132C165801399 @default.
• W2600180132 hasConceptScore W2600180132C171250308 @default.
• W2600180132 hasConceptScore W2600180132C172385210 @default.
• W2600180132 hasConceptScore W2600180132C17525397 @default.
• W2600180132 hasConceptScore W2600180132C177409738 @default.
• W2600180132 hasConceptScore W2600180132C192562407 @default.
• W2600180132 hasConceptScore W2600180132C207789793 @default.
• W2600180132 hasConceptScore W2600180132C2524010 @default.
• W2600180132 hasConceptScore W2600180132C2778413303 @default.
• W2600180132 hasConceptScore W2600180132C2779227376 @default.
• W2600180132 hasConceptScore W2600180132C28826006 @default.
• W2600180132 hasConceptScore W2600180132C30066665 @default.
• W2600180132 hasConceptScore W2600180132C33923547 @default.
• W2600180132 hasConceptScore W2600180132C41008148 @default.
• W2600180132 hasConceptScore W2600180132C48209547 @default.
• W2600180132 hasConceptScore W2600180132C49040817 @default.
• W2600180132 hasConceptScore W2600180132C53524968 @default.
• W2600180132 hasConceptScore W2600180132C62520636 @default.
• W2600180132 hasConceptScore W2600180132C82706917 @default.
• W2600180132 hasConceptScore W2600180132C91721477 @default.
• W2600180132 hasConceptScore W2600180132C99844830 @default.
• W2600180132 hasLocation W26001801321 @default.
• W2600180132 hasOpenAccess W2600180132 @default.
• W2600180132 hasPrimaryLocation W26001801321 @default.
• W2600180132 hasRelatedWork W1981263131 @default.
• W2600180132 hasRelatedWork W1983708828 @default.
• W2600180132 hasRelatedWork W1987597606 @default.
• W2600180132 hasRelatedWork W2014359839 @default.
• W2600180132 hasRelatedWork W2023708320 @default.
• W2600180132 hasRelatedWork W2027893604 @default.
• W2600180132 hasRelatedWork W2038614949 @default.
• W2600180132 hasRelatedWork W2093466312 @default.
• W2600180132 hasRelatedWork W2096432614 @default.
• W2600180132 hasRelatedWork W2101880328 @default.
• W2600180132 hasRelatedWork W2103306948 @default.
• W2600180132 hasRelatedWork W2112535678 @default.
• W2600180132 hasRelatedWork W2126468090 @default.
• W2600180132 hasRelatedWork W2146329985 @default.
• W2600180132 hasRelatedWork W2149264891 @default.
• W2600180132 hasRelatedWork W2159248209 @default.
• W2600180132 hasRelatedWork W2238517559 @default.
• W2600180132 hasRelatedWork W2589632124 @default.
• W2600180132 hasRelatedWork W2155233813 @default.
• W2600180132 hasRelatedWork W2939462140 @default.

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