FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2975133048> ?p ?o ?g. }

• W2975133048 endingPage "25175" @default.
• W2975133048 startingPage "25166" @default.
• W2975133048 abstract "In the atomic layer deposition (ALD) of cobalt (Co) and ruthenium (Ru) metals using nitrogen plasma, the structure and composition of the post N-plasma NHx-terminated (x = 1 or 2) metal surfaces are not well-known but are important in the subsequent metal-containing pulse. In this paper, we use the low-index (001) and (100) surfaces of Co and Ru as models of the metal polycrystalline thin films. The (001) surface with a hexagonal surface structure is the most stable surface, and the (100) surface with a zigzag structure is the least stable surface but has high reactivity. We investigate the stability of NH and NH2 terminations on these surfaces to determine the saturation coverage of NHx on Co and Ru. NH is most stable in the hollow hexagonal close-packed site on the (001) surface and the bridge site on the (100) surface, while NH2 prefers the bridge site on both (001) and (100) surfaces. The differential energy is calculated to find the saturation coverage of NH and NH2. We also present results on mixed NH/NH2-terminations. The results are analyzed by thermodynamics using Gibbs free energies (ΔG) to reveal temperature effects on the stability of NH and NH2 terminations. Ultra-high vacuum and standard ALD operating conditions are considered. Under typical ALD operating conditions, we find that the most stable NHx-terminated metal surfaces are 1 ML NH on the Ru(001) surface (350–550 K), 5/9 ML (0.56 ML) NH on the Co(001) surface (500–650 K) and a mixture of NH and NH2 on both Ru(100) and Co(100) surfaces." @default.
• W2975133048 created "2019-10-03" @default.
• W2975133048 creator A5053483131 @default.
• W2975133048 creator A5083988417 @default.
• W2975133048 date "2019-09-24" @default.
• W2975133048 modified "2023-10-14" @default.
• W2975133048 title "Coverage and Stability of NH<i>_x</i>-Terminated Cobalt and Ruthenium Surfaces: A First-Principles Investigation" @default.
• W2975133048 cites W1644248757 @default.
• W2975133048 cites W1970329395 @default.
• W2975133048 cites W1974105848 @default.
• W2975133048 cites W1979544533 @default.
• W2975133048 cites W1981368803 @default.
• W2975133048 cites W1985693428 @default.
• W2975133048 cites W1995191254 @default.
• W2975133048 cites W2006852465 @default.
• W2975133048 cites W2016838358 @default.
• W2975133048 cites W2016841061 @default.
• W2975133048 cites W2020218687 @default.
• W2975133048 cites W2025172217 @default.
• W2975133048 cites W2035931858 @default.
• W2975133048 cites W2036113194 @default.
• W2975133048 cites W2039898629 @default.
• W2975133048 cites W2042617764 @default.
• W2975133048 cites W2044666036 @default.
• W2975133048 cites W2046809439 @default.
• W2975133048 cites W2065386310 @default.
• W2975133048 cites W2069946148 @default.
• W2975133048 cites W2073565671 @default.
• W2975133048 cites W2086885272 @default.
• W2975133048 cites W2091043969 @default.
• W2975133048 cites W2103838121 @default.
• W2975133048 cites W2108855028 @default.
• W2975133048 cites W2122427541 @default.
• W2975133048 cites W2146383112 @default.
• W2975133048 cites W2149248689 @default.
• W2975133048 cites W2158932701 @default.
• W2975133048 cites W2256032866 @default.
• W2975133048 cites W2261143360 @default.
• W2975133048 cites W2314268343 @default.
• W2975133048 cites W2314397225 @default.
• W2975133048 cites W2321608771 @default.
• W2975133048 cites W2324932279 @default.
• W2975133048 cites W2330163753 @default.
• W2975133048 cites W2335190878 @default.
• W2975133048 cites W2409656962 @default.
• W2975133048 cites W2527995625 @default.
• W2975133048 cites W2567787791 @default.
• W2975133048 cites W2583428019 @default.
• W2975133048 cites W2598231725 @default.
• W2975133048 cites W2887876096 @default.
• W2975133048 cites W2890826679 @default.
• W2975133048 cites W2895125475 @default.
• W2975133048 cites W2910446739 @default.
• W2975133048 cites W2918373433 @default.
• W2975133048 cites W3206606417 @default.
• W2975133048 doi "https://doi.org/10.1021/acs.jpcc.9b06287" @default.
• W2975133048 hasPublicationYear "2019" @default.
• W2975133048 type Work @default.
• W2975133048 sameAs 2975133048 @default.
• W2975133048 citedByCount "10" @default.
• W2975133048 countsByYear W29751330482020 @default.
• W2975133048 countsByYear W29751330482021 @default.
• W2975133048 countsByYear W29751330482022 @default.
• W2975133048 countsByYear W29751330482023 @default.
• W2975133048 crossrefType "journal-article" @default.
• W2975133048 hasAuthorship W2975133048A5053483131 @default.
• W2975133048 hasAuthorship W2975133048A5083988417 @default.
• W2975133048 hasConcept C113196181 @default.
• W2975133048 hasConcept C137637335 @default.
• W2975133048 hasConcept C147789679 @default.
• W2975133048 hasConcept C161790260 @default.
• W2975133048 hasConcept C171250308 @default.
• W2975133048 hasConcept C178790620 @default.
• W2975133048 hasConcept C179104552 @default.
• W2975133048 hasConcept C185592680 @default.
• W2975133048 hasConcept C19067145 @default.
• W2975133048 hasConcept C191897082 @default.
• W2975133048 hasConcept C192271897 @default.
• W2975133048 hasConcept C192562407 @default.
• W2975133048 hasConcept C195839 @default.
• W2975133048 hasConcept C2524010 @default.
• W2975133048 hasConcept C33923547 @default.
• W2975133048 hasConcept C515602321 @default.
• W2975133048 hasConcept C544153396 @default.
• W2975133048 hasConcept C555196967 @default.
• W2975133048 hasConcept C69544855 @default.
• W2975133048 hasConcept C8010536 @default.
• W2975133048 hasConceptScore W2975133048C113196181 @default.
• W2975133048 hasConceptScore W2975133048C137637335 @default.
• W2975133048 hasConceptScore W2975133048C147789679 @default.
• W2975133048 hasConceptScore W2975133048C161790260 @default.
• W2975133048 hasConceptScore W2975133048C171250308 @default.
• W2975133048 hasConceptScore W2975133048C178790620 @default.
• W2975133048 hasConceptScore W2975133048C179104552 @default.
• W2975133048 hasConceptScore W2975133048C185592680 @default.
• W2975133048 hasConceptScore W2975133048C19067145 @default.
• W2975133048 hasConceptScore W2975133048C191897082 @default.
• W2975133048 hasConceptScore W2975133048C192271897 @default.

• next