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• W3014426654 abstract "A systematic investigation of voltage effect on the plasma parameters, especially the species densities and chemical reaction mechanisms, in the capacitive N2 discharges is performed by employing a two-dimensional self-consistent fluid model. The validity of the numerical model is first demonstrated by the qualitative agreement of the calculated and experimental results. Then, the densities, production mechanisms, and loss mechanisms of species from simulation are examined at various voltages. It is found that all the species densities increase monotonically with the voltage, whereas their spatial profiles at lower voltages are quite different from those at higher voltages. The electrons and N2+ ions are mainly generated by the electron impact ionization of N2 gas, while the N+ ions, whose density is one or two orders of magnitude lower, are mostly formed by the ionization of N atoms. The electron impact dissociation of N2 gas dominates the generation of N atoms, which are mostly destroyed for the N+ ion production. As for the excited N2 levels, the level conversion processes play a very important role in their production and depletion mechanisms, except for the electron impact excitation of the ground state N2 molecules." @default.
• W3014426654 created "2020-04-10" @default.
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• W3014426654 date "2020-04-01" @default.
• W3014426654 modified "2023-10-01" @default.
• W3014426654 title "Investigation of voltage effect on reaction mechanisms in capacitively coupled N2 discharges" @default.
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• W3014426654 doi "https://doi.org/10.1063/1.5143821" @default.
• W3014426654 hasPublicationYear "2020" @default.
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