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- W2004956947A5034455210 type Authorship @default.
- W2004956947A5034455210 hasAuthor A5034455210 @default.
- W2004956947A5034455210 hasOrganization I4210141450 @default.
- W2004956947A5034455210 isCorresponding "false" @default.
- W2004956947A5034455210 position "0" @default.
- W2004956947A5034455210 rawAffiliation "Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow District, Russia" @default.