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- W2018311956A5029839968 type Authorship @default.
- W2018311956A5029839968 hasAuthor A5029839968 @default.
- W2018311956A5029839968 hasOrganization I4210142504 @default.
- W2018311956A5029839968 isCorresponding "false" @default.
- W2018311956A5029839968 position "4" @default.
- W2018311956A5029839968 rawAffiliation "Technology Development, Semiconductor Manufacturing International Corporation, Pudong ZhangJia Road 18, Shanghai, 201203 China" @default.