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- W2022198215A5037411704 type Authorship @default.
- W2022198215A5037411704 hasAuthor A5037411704 @default.
- W2022198215A5037411704 hasOrganization I891521709 @default.
- W2022198215A5037411704 isCorresponding "false" @default.
- W2022198215A5037411704 position "3" @default.
- W2022198215A5037411704 rawAffiliation "Mattson Thermal Products GmbH, Daimlerstr. 10, D-89160 Dornstadt, Germany" @default.