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- W2024762541A5037411704 type Authorship @default.
- W2024762541A5037411704 hasAuthor A5037411704 @default.
- W2024762541A5037411704 hasOrganization I4210092660 @default.
- W2024762541A5037411704 isCorresponding "false" @default.
- W2024762541A5037411704 position "4" @default.
- W2024762541A5037411704 rawAffiliation "Mattson Thermal Products GmbH, Dornstadt, Germany" @default.