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- W2045642766A5037411704 type Authorship @default.
- W2045642766A5037411704 hasAuthor A5037411704 @default.
- W2045642766A5037411704 hasOrganization I4210092660 @default.
- W2045642766A5037411704 hasOrganization I891521709 @default.
- W2045642766A5037411704 isCorresponding "false" @default.
- W2045642766A5037411704 position "7" @default.
- W2045642766A5037411704 rawAffiliation "Silke.Paul@mattson.com, Mattson, Mattson Thermal Products GmbH, Daimlerstr. 10, Dornstadt, D-89160, Germany" @default.