Matches in SemOpenAlex for { <https://semopenalex.org/authorship/W2073507946A5032571182> ?p ?o ?g. }
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- W2073507946A5032571182 type Authorship @default.
- W2073507946A5032571182 hasAuthor A5032571182 @default.
- W2073507946A5032571182 hasOrganization I193427800 @default.
- W2073507946A5032571182 isCorresponding "false" @default.
- W2073507946A5032571182 position "0" @default.
- W2073507946A5032571182 rawAffiliation "#N#a#N#Applied Materials Incorporated, Cu, PVD Integrated Systems and Modules, Santa Clara, California 95054, USA #N#" @default.