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- W4313521378A5000528020 type Authorship @default.
- W4313521378A5000528020 hasAuthor A5000528020 @default.
- W4313521378A5000528020 hasOrganization I126520041 @default.
- W4313521378A5000528020 hasOrganization I19820366 @default.
- W4313521378A5000528020 hasOrganization I4210092495 @default.
- W4313521378A5000528020 hasOrganization I4210142539 @default.
- W4313521378A5000528020 isCorresponding "true" @default.
- W4313521378A5000528020 position "1" @default.
- W4313521378A5000528020 rawAffiliation "Guangdong Institute of Semiconductor Micro-nano Manufacturing Technology , Foshan 528000 , China; Key Laboratory of Nano-Devices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS) , Suzhou 215123 , China; School of Nano-Tech and Nano-Bionics , University of Science and Technology of China , Hefei 230026 , China" @default.