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- W4376630424A5000528020 type Authorship @default.
- W4376630424A5000528020 hasAuthor A5000528020 @default.
- W4376630424A5000528020 hasOrganization I126520041 @default.
- W4376630424A5000528020 hasOrganization I19820366 @default.
- W4376630424A5000528020 hasOrganization I4210092495 @default.
- W4376630424A5000528020 hasOrganization I4210142539 @default.
- W4376630424A5000528020 isCorresponding "false" @default.
- W4376630424A5000528020 position "11" @default.
- W4376630424A5000528020 rawAffiliation "Guangdong Institute of Semiconductor Micro-Nano Manufacturing Technology, Foshan 528000, China; Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China; School of Nano Technology and Nano Bionics, University of Science and Technology of China, Hefei 230026, China" @default.