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- W63749368A5021592158 type Authorship @default.
- W63749368A5021592158 hasAuthor A5021592158 @default.
- W63749368A5021592158 hasOrganization I4210141450 @default.
- W63749368A5021592158 isCorresponding "false" @default.
- W63749368A5021592158 position "1" @default.
- W63749368A5021592158 rawAffiliation "Institute of Microelectronic Technology and Ultrahigh-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia" @default.