Matches in SemOpenAlex for { <https://semopenalex.org/concept/C107187091> ?p ?o ?g. }
Showing items 1 to 55 of
55
with 100 items per page.
- C107187091 created "2016-06-24" @default.
- C107187091 modified "2023-10-18" @default.
- C107187091 type Concept @default.
- C107187091 seeAlso "https://en.wikipedia.org/wiki/Plasma%20etching" @default.
- C107187091 sameAs Q2392011 @default.
- C107187091 sameAs 107187091 @default.
- C107187091 broader C100460472 @default.
- C107187091 broader C159985019 @default.
- C107187091 broader C171250308 @default.
- C107187091 broader C178790620 @default.
- C107187091 broader C185592680 @default.
- C107187091 broader C192562407 @default.
- C107187091 broader C2779227376 @default.
- C107187091 inScheme concepts @default.
- C107187091 note "industrial process" @default.
- C107187091 prefLabel "Plasma etching" @default.
- C107187091 related C105487726 @default.
- C107187091 related C108225325 @default.
- C107187091 related C124634506 @default.
- C107187091 related C130472188 @default.
- C107187091 related C145738678 @default.
- C107187091 related C180088628 @default.
- C107187091 related C2779089622 @default.
- C107187091 related C2779869380 @default.
- C107187091 related C2780740191 @default.
- C107187091 related C2781048479 @default.
- C107187091 related C37977207 @default.
- C107187091 related C38347018 @default.
- C107187091 related C41823505 @default.
- C107187091 related C506198293 @default.
- C107187091 related C513153333 @default.
- C107187091 related C527607 @default.
- C107187091 related C530198007 @default.
- C107187091 related C540031477 @default.
- C107187091 related C544956773 @default.
- C107187091 related C57410435 @default.
- C107187091 related C60581705 @default.
- C107187091 related C61427134 @default.
- C107187091 related C66018809 @default.
- C107187091 citedByCount "142528" @default.
- C107187091 countsByYear C1071870912012 @default.
- C107187091 countsByYear C1071870912013 @default.
- C107187091 countsByYear C1071870912014 @default.
- C107187091 countsByYear C1071870912015 @default.
- C107187091 countsByYear C1071870912016 @default.
- C107187091 countsByYear C1071870912017 @default.
- C107187091 countsByYear C1071870912018 @default.
- C107187091 countsByYear C1071870912019 @default.
- C107187091 countsByYear C1071870912020 @default.
- C107187091 countsByYear C1071870912021 @default.
- C107187091 countsByYear C1071870912022 @default.
- C107187091 countsByYear C1071870912023 @default.
- C107187091 level "4" @default.
- C107187091 magId "107187091" @default.
- C107187091 worksCount "11232" @default.