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- C124634506 created "2016-06-24" @default.
- C124634506 modified "2023-10-18" @default.
- C124634506 type Concept @default.
- C124634506 seeAlso "https://en.wikipedia.org/wiki/Deep%20reactive-ion%20etching" @default.
- C124634506 sameAs Q486936 @default.
- C124634506 sameAs 124634506 @default.
- C124634506 broader C100460472 @default.
- C124634506 broader C130472188 @default.
- C124634506 broader C159985019 @default.
- C124634506 broader C171250308 @default.
- C124634506 broader C178790620 @default.
- C124634506 broader C185592680 @default.
- C124634506 broader C192562407 @default.
- C124634506 broader C2779227376 @default.
- C124634506 inScheme concepts @default.
- C124634506 prefLabel "Deep reactive-ion etching" @default.
- C124634506 related C100460472 @default.
- C124634506 related C105487726 @default.
- C124634506 related C107187091 @default.
- C124634506 related C121285527 @default.
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- C124634506 related C160671074 @default.
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- C124634506 related C57410435 @default.
- C124634506 related C66018809 @default.
- C124634506 related C71085134 @default.
- C124634506 related C81626474 @default.
- C124634506 related C85725439 @default.
- C124634506 citedByCount "39492" @default.
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- C124634506 countsByYear C1246345062013 @default.
- C124634506 countsByYear C1246345062014 @default.
- C124634506 countsByYear C1246345062015 @default.
- C124634506 countsByYear C1246345062016 @default.
- C124634506 countsByYear C1246345062017 @default.
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- C124634506 countsByYear C1246345062019 @default.
- C124634506 countsByYear C1246345062020 @default.
- C124634506 countsByYear C1246345062021 @default.
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- C124634506 countsByYear C1246345062023 @default.
- C124634506 level "5" @default.
- C124634506 magId "124634506" @default.
- C124634506 umlsCui "C0814215" @default.
- C124634506 worksCount "3389" @default.