Matches in SemOpenAlex for { <https://semopenalex.org/concept/C1291036> ?p ?o ?g. }
Showing items 1 to 48 of
48
with 100 items per page.
- C1291036 created "2016-06-24" @default.
- C1291036 modified "2023-10-18" @default.
- C1291036 type Concept @default.
- C1291036 sameAs Q1191918 @default.
- C1291036 sameAs 1291036 @default.
- C1291036 broader C100460472 @default.
- C1291036 broader C159985019 @default.
- C1291036 broader C171250308 @default.
- C1291036 broader C178790620 @default.
- C1291036 broader C185592680 @default.
- C1291036 broader C192562407 @default.
- C1291036 broader C2779227376 @default.
- C1291036 inScheme concepts @default.
- C1291036 note "controlled material removal, without the use of liquid substances" @default.
- C1291036 prefLabel "Dry etching" @default.
- C1291036 related C100460472 @default.
- C1291036 related C105487726 @default.
- C1291036 related C108225325 @default.
- C1291036 related C124634506 @default.
- C1291036 related C130472188 @default.
- C1291036 related C160671074 @default.
- C1291036 related C172385210 @default.
- C1291036 related C173118649 @default.
- C1291036 related C22423302 @default.
- C1291036 related C33220542 @default.
- C1291036 related C37977207 @default.
- C1291036 related C41823505 @default.
- C1291036 related C50774322 @default.
- C1291036 related C527607 @default.
- C1291036 related C530198007 @default.
- C1291036 related C544956773 @default.
- C1291036 related C66018809 @default.
- C1291036 citedByCount "106468" @default.
- C1291036 countsByYear C12910362012 @default.
- C1291036 countsByYear C12910362013 @default.
- C1291036 countsByYear C12910362014 @default.
- C1291036 countsByYear C12910362015 @default.
- C1291036 countsByYear C12910362016 @default.
- C1291036 countsByYear C12910362017 @default.
- C1291036 countsByYear C12910362018 @default.
- C1291036 countsByYear C12910362019 @default.
- C1291036 countsByYear C12910362020 @default.
- C1291036 countsByYear C12910362021 @default.
- C1291036 countsByYear C12910362022 @default.
- C1291036 countsByYear C12910362023 @default.
- C1291036 level "4" @default.
- C1291036 magId "1291036" @default.
- C1291036 worksCount "10937" @default.