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- C163581340 created "2016-06-24" @default.
- C163581340 modified "2023-10-18" @default.
- C163581340 type Concept @default.
- C163581340 seeAlso "https://en.wikipedia.org/wiki/Next-generation%20lithography" @default.
- C163581340 sameAs Q1983848 @default.
- C163581340 sameAs 163581340 @default.
- C163581340 broader C136525101 @default.
- C163581340 broader C142724271 @default.
- C163581340 broader C159985019 @default.
- C163581340 broader C171250308 @default.
- C163581340 broader C178790620 @default.
- C163581340 broader C185592680 @default.
- C163581340 broader C192562407 @default.
- C163581340 broader C200274948 @default.
- C163581340 broader C204787440 @default.
- C163581340 broader C2779227376 @default.
- C163581340 broader C53524968 @default.
- C163581340 broader C71924100 @default.
- C163581340 inScheme concepts @default.
- C163581340 note "technical term" @default.
- C163581340 prefLabel "Next-generation lithography" @default.
- C163581340 related C105487726 @default.
- C163581340 related C134406635 @default.
- C163581340 related C137905882 @default.
- C163581340 related C14737013 @default.
- C163581340 related C162117346 @default.
- C163581340 related C162996421 @default.
- C163581340 related C177409738 @default.
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- C163581340 related C200274948 @default.
- C163581340 related C204223013 @default.
- C163581340 related C2777046567 @default.
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- C163581340 related C41794268 @default.
- C163581340 related C78371743 @default.
- C163581340 related C94263209 @default.
- C163581340 related C94631461 @default.
- C163581340 citedByCount "56142" @default.
- C163581340 countsByYear C1635813402012 @default.
- C163581340 countsByYear C1635813402013 @default.
- C163581340 countsByYear C1635813402014 @default.
- C163581340 countsByYear C1635813402015 @default.
- C163581340 countsByYear C1635813402016 @default.
- C163581340 countsByYear C1635813402017 @default.
- C163581340 countsByYear C1635813402018 @default.
- C163581340 countsByYear C1635813402019 @default.
- C163581340 countsByYear C1635813402020 @default.
- C163581340 countsByYear C1635813402021 @default.
- C163581340 countsByYear C1635813402022 @default.
- C163581340 countsByYear C1635813402023 @default.
- C163581340 level "5" @default.
- C163581340 magId "163581340" @default.
- C163581340 worksCount "4986" @default.