Matches in SemOpenAlex for { <https://semopenalex.org/concept/C66018809> ?p ?o ?g. }
- C66018809 created "2016-06-24" @default.
- C66018809 modified "2023-10-18" @default.
- C66018809 type Concept @default.
- C66018809 seeAlso "https://en.wikipedia.org/wiki/Semiconductor%20device%20fabrication" @default.
- C66018809 sameAs Q1570432 @default.
- C66018809 sameAs 66018809 @default.
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- C66018809 note "manufacturing process used to create integrated circuits" @default.
- C66018809 prefLabel "Semiconductor device fabrication" @default.
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- C66018809 depiction "https://upload.wikimedia.org/wikipedia/commons/5/50/Clean_room.jpg" @default.
- C66018809 citedByCount "75114" @default.
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