Matches in SemOpenAlex for { <https://semopenalex.org/concept/C72832162> ?p ?o ?g. }
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- C72832162 created "2016-06-24" @default.
- C72832162 modified "2023-10-18" @default.
- C72832162 type Concept @default.
- C72832162 seeAlso "https://en.wikipedia.org/wiki/Rapid%20thermal%20processing" @default.
- C72832162 sameAs Q2131545 @default.
- C72832162 sameAs 72832162 @default.
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- C72832162 broader C205649164 @default.
- C72832162 broader C49040817 @default.
- C72832162 broader C544956773 @default.
- C72832162 broader C97355855 @default.
- C72832162 inScheme concepts @default.
- C72832162 note "quickly heats semiconductor wafers to high temperatures" @default.
- C72832162 prefLabel "Rapid thermal processing" @default.
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- C72832162 citedByCount "20012" @default.
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- C72832162 level "3" @default.
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