Matches in SemOpenAlex for { <https://semopenalex.org/concept/C94263209> ?p ?o ?g. }
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- C94263209 created "2016-06-24" @default.
- C94263209 modified "2023-10-18" @default.
- C94263209 type Concept @default.
- C94263209 seeAlso "https://en.wikipedia.org/wiki/Immersion%20lithography" @default.
- C94263209 sameAs Q1076175 @default.
- C94263209 sameAs 94263209 @default.
- C94263209 broader C159985019 @default.
- C94263209 broader C171250308 @default.
- C94263209 broader C178790620 @default.
- C94263209 broader C185592680 @default.
- C94263209 broader C192562407 @default.
- C94263209 broader C2779227376 @default.
- C94263209 broader C53524968 @default.
- C94263209 inScheme concepts @default.
- C94263209 note "photolithography technique for manufacturing integrated circuits" @default.
- C94263209 prefLabel "Immersion lithography" @default.
- C94263209 related C105487726 @default.
- C94263209 related C134406635 @default.
- C94263209 related C14737013 @default.
- C94263209 related C159108749 @default.
- C94263209 related C162117346 @default.
- C94263209 related C162996421 @default.
- C94263209 related C163581340 @default.
- C94263209 related C177409738 @default.
- C94263209 related C182873914 @default.
- C94263209 related C187504802 @default.
- C94263209 related C200274948 @default.
- C94263209 related C2776798109 @default.
- C94263209 related C2777046567 @default.
- C94263209 related C35750839 @default.
- C94263209 related C41794268 @default.
- C94263209 related C42067758 @default.
- C94263209 related C530198007 @default.
- C94263209 related C66018809 @default.
- C94263209 related C78371743 @default.
- C94263209 depiction "https://upload.wikimedia.org/wikipedia/commons/b/b5/Immersion_lithography_illustration.svg" @default.
- C94263209 citedByCount "19085" @default.
- C94263209 countsByYear C942632092012 @default.
- C94263209 countsByYear C942632092013 @default.
- C94263209 countsByYear C942632092014 @default.
- C94263209 countsByYear C942632092015 @default.
- C94263209 countsByYear C942632092016 @default.
- C94263209 countsByYear C942632092017 @default.
- C94263209 countsByYear C942632092018 @default.
- C94263209 countsByYear C942632092019 @default.
- C94263209 countsByYear C942632092020 @default.
- C94263209 countsByYear C942632092021 @default.
- C94263209 countsByYear C942632092022 @default.
- C94263209 countsByYear C942632092023 @default.
- C94263209 imageThumbnail "https://upload.wikimedia.org/wikipedia/commons/thumb/b/b5/Immersion_lithography_illustration.svg/100px-Immersion_lithography_illustration.svg.png" @default.
- C94263209 level "4" @default.
- C94263209 magId "94263209" @default.
- C94263209 worksCount "3135" @default.
