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- W16642279051 hasURL "https://www.researchgate.net/profile/Eric_Garfunkel/publication/247520043_Silicon_Oxidation_and_Oxynitridation_in_the_Ultrathin_Regime_Ion_Scattering_Studies/links/53ce863a0cf2d9fc4314ad5e.pdf" @default.
- W16642279051 type Location @default.
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- W16642279051 isOa "false" @default.