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- W19816536811 hasURL "https://doi.org/10.1116/1.580783" @default.
- W19816536811 type Location @default.
- W19816536811 hasSource S4210190837 @default.
- W19816536811 hasVersion "publishedVersion" @default.
- W19816536811 isOa "true" @default.
- W19816536811 pdfUrl "https://pubs.aip.org/avs/jva/article-pdf/15/3/941/11109576/941_1_online.pdf" @default.