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- W19823809341 hasURL "https://doi.org/10.1116/1.571465" @default.
- W19823809341 type Location @default.
- W19823809341 hasSource S52593085 @default.
- W19823809341 hasVersion "publishedVersion" @default.
- W19823809341 isOa "true" @default.
- W19823809341 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/20/3/364/12165916/364_1_online.pdf" @default.