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- W19953920841 hasURL "https://doi.org/10.1116/1.1316372" @default.
- W19953920841 type Location @default.
- W19953920841 hasSource S52593085 @default.
- W19953920841 hasVersion "publishedVersion" @default.
- W19953920841 isOa "true" @default.
- W19953920841 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/8/1/99/12172689/99_1_online.pdf" @default.