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- W20004785151 hasURL "https://doi.org/10.1117/12.2016432" @default.
- W20004785151 type Location @default.
- W20004785151 hasSource S183492911 @default.
- W20004785151 hasVersion "publishedVersion" @default.
- W20004785151 isOa "true" @default.
- W20004785151 pdfUrl "https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8725/872502/Nano-electro-mechanical-systems-NEMS-and-energy-efficient-electronics-and/10.1117/12.2016432.pdf" @default.