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- W20016614851 hasURL "https://doi.org/10.1116/1.1312755" @default.
- W20016614851 type Location @default.
- W20016614851 hasSource S52593085 @default.
- W20016614851 hasVersion "publishedVersion" @default.
- W20016614851 isOa "true" @default.
- W20016614851 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/11/4/797/11523293/797_1_online.pdf" @default.