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- W20059183461 hasURL "https://doi.org/10.1116/1.1317018" @default.
- W20059183461 type Location @default.
- W20059183461 hasSource S52593085 @default.
- W20059183461 hasVersion "publishedVersion" @default.
- W20059183461 isOa "true" @default.
- W20059183461 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/9/5/1237/12013090/1237_1_online.pdf" @default.