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- W20063132341 hasURL "https://doi.org/10.1116/1.568529" @default.
- W20063132341 type Location @default.
- W20063132341 hasSource S52593085 @default.
- W20063132341 hasVersion "publishedVersion" @default.
- W20063132341 isOa "true" @default.
- W20063132341 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/12/6/1324/12194722/1324_1_online.pdf" @default.