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- W20186426921 hasURL "https://doi.org/10.1116/1.568870" @default.
- W20186426921 type Location @default.
- W20186426921 hasSource S52593085 @default.
- W20186426921 hasVersion "publishedVersion" @default.
- W20186426921 isOa "true" @default.
- W20186426921 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/13/1/102/12087142/102_1_online.pdf" @default.