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- W20221361001 hasURL "https://doi.org/10.1116/1.577611" @default.
- W20221361001 type Location @default.
- W20221361001 hasSource S4210190837 @default.
- W20221361001 hasVersion "publishedVersion" @default.
- W20221361001 isOa "true" @default.
- W20221361001 pdfUrl "https://pubs.aip.org/avs/jva/article-pdf/9/3/1272/11516842/1272_1_online.pdf" @default.