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- W20227796051 hasURL "https://doi.org/10.1117/12.773640" @default.
- W20227796051 type Location @default.
- W20227796051 hasSource S183492911 @default.
- W20227796051 hasVersion "publishedVersion" @default.
- W20227796051 isOa "true" @default.
- W20227796051 pdfUrl "https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6884/68840B/A-perspective-on-the-reliability-of-MEMS-based-components-for/10.1117/12.773640.pdf" @default.