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- W20377452911 hasURL "https://doi.org/10.1116/1.1318504" @default.
- W20377452911 type Location @default.
- W20377452911 hasSource S52593085 @default.
- W20377452911 hasVersion "publishedVersion" @default.
- W20377452911 isOa "true" @default.
- W20377452911 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/10/6/1131/11370214/1131_5_online.pdf" @default.