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- W20846654471 hasURL "https://doi.org/10.1116/1.1318514" @default.
- W20846654471 type Location @default.
- W20846654471 hasSource S52593085 @default.
- W20846654471 hasVersion "publishedVersion" @default.
- W20846654471 isOa "true" @default.
- W20846654471 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/10/6/913/11370386/913_1_online.pdf" @default.