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- W20874043911 hasURL "https://doi.org/10.1116/1.1317719" @default.
- W20874043911 type Location @default.
- W20874043911 hasSource S52593085 @default.
- W20874043911 hasVersion "publishedVersion" @default.
- W20874043911 isOa "true" @default.
- W20874043911 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/9/2/569/11518872/569_1_online.pdf" @default.