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- W20885962221 hasURL "https://doi.org/10.1116/1.571540" @default.
- W20885962221 type Location @default.
- W20885962221 hasSource S52593085 @default.
- W20885962221 hasVersion "publishedVersion" @default.
- W20885962221 isOa "true" @default.
- W20885962221 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/20/4/1052/11654683/1052_1_online.pdf" @default.