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- W20933541251 hasURL "https://doi.org/10.1116/1.569384" @default.
- W20933541251 type Location @default.
- W20933541251 hasSource S52593085 @default.
- W20933541251 hasVersion "publishedVersion" @default.
- W20933541251 isOa "true" @default.
- W20933541251 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/14/5/1196/11398181/1196_1_online.pdf" @default.