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- W20953042971 hasURL "https://doi.org/10.1117/1.3062205" @default.
- W20953042971 type Location @default.
- W20953042971 hasSource S205064806 @default.
- W20953042971 hasVersion "publishedVersion" @default.
- W20953042971 isOa "true" @default.
- W20953042971 pdfUrl "https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-7/issue-4/040101/Successors-of-ArF-Water-Immersion-Lithography--EUV-Lithography-Multi/10.1117/1.3062205.pdf" @default.