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- W21300486051 hasURL "https://doi.org/10.1116/1.571585" @default.
- W21300486051 type Location @default.
- W21300486051 hasSource S52593085 @default.
- W21300486051 hasVersion "publishedVersion" @default.
- W21300486051 isOa "true" @default.
- W21300486051 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/20/4/1124/11654653/1124_1_online.pdf" @default.