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- W21333159621 hasURL "https://doi.org/10.1116/1.570636" @default.
- W21333159621 type Location @default.
- W21333159621 hasSource S52593085 @default.
- W21333159621 hasVersion "publishedVersion" @default.
- W21333159621 isOa "true" @default.
- W21333159621 pdfUrl "https://pubs.aip.org/avs/jvst/article-pdf/17/5/1184/11439567/1184_1_online.pdf" @default.