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- W21740959351 license "cc-by-nc-nd" @default.
- W21740959351 hasURL "https://doi.org/10.1017/hpl.2015.30" @default.
- W21740959351 type Location @default.
- W21740959351 hasSource S2764641825 @default.
- W21740959351 hasVersion "publishedVersion" @default.
- W21740959351 isOa "true" @default.
- W21740959351 pdfUrl "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/65F8DE5D231790A38FF96AF59713A02F/S2095471915000304a.pdf/div-class-title-space-and-time-resolved-diagnostics-of-the-enea-euv-discharge-produced-plasma-source-used-for-metrology-and-other-applications-div.pdf" @default.